實(shi)驗(yan)(yan)氣(qi)(qi)相(xiang)沉積爐(lu)(lu)(lu)怎么(me)安(an)裝(zhuang)呢(ni) 實(shi)驗(yan)(yan)氣(qi)(qi)相(xiang)沉積爐(lu)(lu)(lu)怎么(me)安(an)裝(zhuang)呢(ni)?今(jin)天和大(da)家(jia)介紹下詳細的(de)(de)(de)(de)步驟。 1.氣(qi)(qi)相(xiang)沉積爐(lu)(lu)(lu)不(bu)(bu)(bu)(bu)需(xu)(xu)特殊(shu)安(an)裝(zhuang),只需(xu)(xu)平放(fang)(fang)在室內地面(mian)或(huo)臺架(jia)上。控(kong)(kong)制(zhi)器(qi)(qi)應(ying)(ying)放(fang)(fang)在工(gong)作(zuo)臺上,工(gong)作(zuo)臺面(mian)的(de)(de)(de)(de)傾(qing)斜(xie)度(du)(du)不(bu)(bu)(bu)(bu)得超(chao)過5度(du)(du)。控(kong)(kong)制(zhi)器(qi)(qi)離(li)(li)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)爐(lu)(lu)(lu)距(ju)離(li)(li)不(bu)(bu)(bu)(bu)得少于0.5米,控(kong)(kong)制(zhi)器(qi)(qi)不(bu)(bu)(bu)(bu)宜(yi)放(fang)(fang)在電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)爐(lu)(lu)(lu)上面(mian),以免影響控(kong)(kong)制(zhi)器(qi)(qi)正常(chang)工(gong)作(zuo)。 2.與控(kong)(kong)制(zhi)器(qi)(qi)及(ji)實(shi)驗(yan)(yan)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)爐(lu)(lu)(lu)相(xiang)連(lian)的(de)(de)(de)(de)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)源線(xian),開關(guan)(guan)及(ji)熔斷器(qi)(qi)的(de)(de)(de)(de)負(fu)載能力應(ying)(ying)稍大(da)于實(shi)驗(yan)(yan)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)爐(lu)(lu)(lu)的(de)(de)(de)(de)額定(ding)功率。 3.接(jie)(jie)線(xian)時(shi)(shi),先(xian)轉松(song)控(kong)(kong)制(zhi)器(qi)(qi)外殼左右兩側(ce)的(de)(de)(de)(de)螺釘(ding),然后(hou)(hou)(hou)(hou)將罩(zhao)殼上翻,按(an)圖(tu)示接(jie)(jie)好(hao)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)源線(xian)。控(kong)(kong)制(zhi)器(qi)(qi)與電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)爐(lu)(lu)(lu)的(de)(de)(de)(de)連(lian)線(xian)及(ji)熱(re)(re)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)偶(ou)(ou)(ou)連(lian)接(jie)(jie)線(xian)。將熱(re)(re)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)偶(ou)(ou)(ou)從熱(re)(re)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)偶(ou)(ou)(ou)固定(ding)座(zuo)的(de)(de)(de)(de)小(xiao)孔(kong)中插入(ru)爐(lu)(lu)(lu)膛,孔(kong)與熱(re)(re)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)之間(jian)間(jian)隙用(yong)(yong)石棉繩堵(du)塞,然后(hou)(hou)(hou)(hou)固定(ding)。 4.檢(jian)查接(jie)(jie)線(xian)無誤(wu)后(hou)(hou)(hou)(hou)即可(ke)通電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian),先(xian)合(he)上氣(qi)(qi)相(xiang)沉積爐(lu)(lu)(lu)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)源開關(guan)(guan),然后(hou)(hou)(hou)(hou)將控(kong)(kong)制(zhi)器(qi)(qi)面(mian)板上的(de)(de)(de)(de)鈕(niu)子(zi)開關(guan)(guan)拔向開的(de)(de)(de)(de)位置,調(diao)節設定(ding)按(an)鈕(niu),把溫(wen)(wen)度(du)(du)設定(ding)到(dao)您所(suo)需(xu)(xu)要的(de)(de)(de)(de)度(du)(du)數上,如果把設定(ding)開關(guan)(guan)拔向測(ce)量位置上,紅燈(deng)滅,亦(yi)有接(jie)(jie)觸器(qi)(qi)的(de)(de)(de)(de)吸合(he)聲響,電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)爐(lu)(lu)(lu)通電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian),電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)流表(biao)指示加熱(re)(re)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)流值,溫(wen)(wen)度(du)(du)隨爐(lu)(lu)(lu)內溫(wen)(wen)度(du)(du)升(sheng)高而徐徐上升(sheng),說明工(gong)作(zuo)正常(chang)。當(dang)(dang)溫(wen)(wen)度(du)(du)上升(sheng)至設定(ding)的(de)(de)(de)(de)所(suo)需(xu)(xu)要溫(wen)(wen)度(du)(du)時(shi)(shi),紅燈(deng)滅,綠(lv)燈(deng)亮,電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)爐(lu)(lu)(lu)自(zi)動斷電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian),停止升(sheng)溫(wen)(wen)。稍后(hou)(hou)(hou)(hou),當(dang)(dang)爐(lu)(lu)(lu)內溫(wen)(wen)度(du)(du)稍微(wei)下降(jiang),綠(lv)燈(deng)滅,紅燈(deng)亮,電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)爐(lu)(lu)(lu)又(you)自(zi)動通電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)。周而復始(shi),達到(dao)自(zi)動控(kong)(kong)制(zhi)爐(lu)(lu)(lu)內溫(wen)(wen)度(du)(du)的(de)(de)(de)(de)目的(de)(de)(de)(de)。 5.為(wei)了檢(jian)查斷偶(ou)(ou)(ou)保護裝(zhuang)置是否正常(chang)工(gong)作(zuo),其方法是:松(song)開熱(re)(re)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)偶(ou)(ou)(ou)一端(duan),此時(shi)(shi)測(ce)溫(wen)(wen)指示迅速上升(sheng)到(dao)高點亦(yi)自(zi)動切斷加熱(re)(re)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)源,則斷偶(ou)(ou)(ou)裝(zhuang)置良好(hao),重新接(jie)(jie)好(hao)的(de)(de)(de)(de)熱(re)(re)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)偶(ou)(ou)(ou)后(hou)(hou)(hou)(hou),可(ke)正常(chang)工(gong)作(zuo)。 6.烘爐(lu)(lu)(lu),當(dang)(dang)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)爐(lu)(lu)(lu)頭(tou)一次使用(yong)(yong)或(huo)長期(qi)停用(yong)(yong)后(hou)(hou)(hou)(hou)再次使用(yong)(yong)時(shi)(shi),必(bi)須進行烘爐(lu)(lu)(lu)。其過程如下:當(dang)(dang)室溫(wen)(wen)升(sheng)到(dao)200℃4小(xiao)時(shi)(shi),當(dang)(dang)200℃到(dao)600℃4小(xiao)時(shi)(shi),當(dang)(dang)600℃到(dao)800℃2小(xiao)時(shi)(shi)(關(guan)(guan)閉爐(lu)(lu)(lu)門)。 7.使用(yong)(yong)氣(qi)(qi)相(xiang)沉積爐(lu)(lu)(lu)完畢,先(xian)將控(kong)(kong)制(zhi)面(mian)板上的(de)(de)(de)(de)鈕(niu)子(zi)開關(guan)(guan)拔向關(guan)(guan)的(de)(de)(de)(de)位置,然后(hou)(hou)(hou)(hou)切斷總(zong)電(dian)(dian)(dian)(dian)(dian)(dian)(dian)(dian)源開關(guan)(guan)。