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氣相沉積爐日常使用方法有哪些呢
發布時間:2022-02-16   瀏覽:2077次

  氣相沉積爐日常使用方法有哪些(xie)呢

  氣相沉積爐主要用(yong)于半(ban)(ban)導(dao)體元器件及電力整流裝(zhuang)置的(de)(de)(de)燒(shao)(shao)結(jie)(jie)(jie)工(gong)藝,可進行真(zhen)(zhen)空(kong)(kong)(kong)燒(shao)(shao)結(jie)(jie)(jie)、氣體保護燒(shao)(shao)結(jie)(jie)(jie)及常(chang)規(gui)燒(shao)(shao)結(jie)(jie)(jie),是半(ban)(ban)導(dao)體專(zhuan)用(yong)設備(bei)系(xi)列中(zhong)新穎(ying)的(de)(de)(de)技術(shu)裝(zhuang)備(bei),設計思(si)路新穎(ying),操作(zuo)方便,結(jie)(jie)(jie)構緊湊,一臺(tai)設備(bei)即可完成(cheng)多個工(gong)藝流程。也(ye)可用(yong)于其他(ta)領域(yu)的(de)(de)(de)真(zhen)(zhen)空(kong)(kong)(kong)熱處理、真(zhen)(zhen)空(kong)(kong)(kong)釬(han)焊等(deng)工(gong)藝,那(nei)么下(xia)面一起了解下(xia)爐子的(de)(de)(de)使用(yong)必備(bei)技巧吧(ba)!

  氣(qi)相沉積爐在抽(chou)真空后氫氣(qi)保護的情(qing)況下,利用中頻感應加熱原(yuan)理,使(shi)位于盤管(guan)內(nei)的鎢坩堝達(da)到高(gao)溫(wen),通過熱輻射(she)傳導到工作中,適用于科研、軍工部門對鎢、鉬及其(qi)合金粉末進行成型燒結。安裝爐子的場(chang)地(di)應符合真空衛生要求,周圍空氣(qi)清潔干燥(zao),通風條件(jian)好,工作場(chang)所(suo)不易揚(yang)起灰(hui)塵等。它的日常(chang)使(shi)用方法(fa):

氣相沉積爐

  1、檢查控制(zhi)柜內所有零部件及部件是否完好、完好。

  2、控制柜安裝固(gu)定在相應的基礎(chu)上。

  3、查看接線圖(tu),參考電路(lu)圖(tu),連接外接主回路(lu)和控(kong)制(zhi)回路(lu),可靠接地,保(bao)證接線無誤。

  4、檢查電(dian)器(qi)活動部位(wei)活動自如(ru),無卡死現(xian)象。

  5、絕緣電(dian)阻(zu)不(bu)應小于2萬億歐姆。

  6、氣相沉積爐各(ge)閥門必須在關閉(bi)位置。

  7、控(kong)制電(dian)源開關置于斷開位(wei)置。

  8、手動(dong)調壓旋鈕逆時針轉動(dong)頭。

  9、將報警按鈕置于(yu)打(da)開位置。

  10、平(ping)面圖完成設(she)備(bei)循環冷(leng)卻水(shui)(shui)(shui)連(lian)接時(shi),建議用(yong)戶(hu)在氣相沉積爐(lu)總(zong)進出水(shui)(shui)(shui)管(guan)處(chu)再(zai)加(jia)一層備(bei)用(yong)水(shui)(shui)(shui)(可用(yong)自來水(shui)(shui)(shui)),防止循環水(shui)(shui)(shui)故障或斷電引(yin)起密封圈燃燒(shao)。

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