真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)爐(lu)(lu)(lu)(lu)的(de)(de)(de)(de)應(ying)用(yong)(yong)(yong)(yong)(yong)領域(yu)及技(ji)術參數真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)爐(lu)(lu)(lu)(lu)是一種(zhong)在(zai)高(gao)(gao)(gao)溫(wen)(wen)下(xia)對(dui)物料(liao)進(jin)(jin)行(xing)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)處(chu)理(li)的(de)(de)(de)(de)高(gao)(gao)(gao)性能(neng)設備(bei)(bei)，廣(guang)泛應(ying)用(yong)(yong)(yong)(yong)(yong)于導熱膜(mo)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)、玻璃(li)纖維(wei)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)、有機物碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)、粉末(mo)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)等行(xing)業(ye)。它(ta)采用(yong)(yong)(yong)(yong)(yong)先(xian)進(jin)(jin)的(de)(de)(de)(de)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)技(ji)術和(he)加(jia)(jia)(jia)熱系(xi)統，能(neng)夠實(shi)現(xian)(xian)物料(liao)的(de)(de)(de)(de)高(gao)(gao)(gao)-效(xiao)、均勻(yun)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)處(chu)理(li)，適用(yong)(yong)(yong)(yong)(yong)于各種(zhong)高(gao)(gao)(gao)端材(cai)(cai)料(liao)的(de)(de)(de)(de)加(jia)(jia)(jia)工(gong)需求(qiu)(qiu)。以(yi)下(xia)是關(guan)于真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)爐(lu)(lu)(lu)(lu)的(de)(de)(de)(de)詳細信(xin)息：真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)爐(lu)(lu)(lu)(lu)的(de)(de)(de)(de)應(ying)用(yong)(yong)(yong)(yong)(yong)領域(yu)-新(xin)材(cai)(cai)料(liao)領域(yu)：用(yong)(yong)(yong)(yong)(yong)于新(xin)材(cai)(cai)料(liao)的(de)(de)(de)(de)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)處(chu)理(li)，如(ru)碳(tan)(tan)(tan)(tan)(tan)碳(tan)(tan)(tan)(tan)(tan)材(cai)(cai)料(liao)和(he)特種(zhong)陶瓷。-化(hua)(hua)(hua)(hua)(hua)(hua)(hua)工(gong)領域(yu)：用(yong)(yong)(yong)(yong)(yong)于有機物的(de)(de)(de)(de)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)反(fan)應(ying)。-冶金(jin)領域(yu)：用(yong)(yong)(yong)(yong)(yong)于金(jin)屬粉末(mo)的(de)(de)(de)(de)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)處(chu)理(li)。-環(huan)保領域(yu)：用(yong)(yong)(yong)(yong)(yong)于工(gong)業(ye)固廢和(he)市政污泥的(de)(de)(de)(de)處(chu)理(li)，實(shi)現(xian)(xian)資源的(de)(de)(de)(de)回收和(he)減少環(huan)境污染。真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)爐(lu)(lu)(lu)(lu)的(de)(de)(de)(de)特點-超(chao)高(gao)(gao)(gao)溫(wen)(wen)爐(lu)(lu)(lu)(lu)體：能(neng)夠達到2200℃以(yi)內的(de)(de)(de)(de)超(chao)高(gao)(gao)(gao)溫(wen)(wen)，滿(man)足不(bu)同(tong)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)及燒(shao)結工(gong)藝(yi)的(de)(de)(de)(de)需求(qiu)(qiu)。-優良(liang)的(de)(de)(de)(de)阻值(zhi)結構和(he)密度：實(shi)現(xian)(xian)連續真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)燒(shao)結工(gong)藝(yi)，延長碳(tan)(tan)(tan)(tan)(tan)氈及發熱材(cai)(cai)料(liao)的(de)(de)(de)(de)使用(yong)(yong)(yong)(yong)(yong)壽命。-先(xian)進(jin)(jin)的(de)(de)(de)(de)自動化(hua)(hua)(hua)(hua)(hua)(hua)(hua)控制(zhi)：采用(yong)(yong)(yong)(yong)(yong)PLC水、電、氣自動控制(zhi)和(he)保護系(xi)統，確保設備(bei)(bei)的(de)(de)(de)(de)安全和(he)穩定運行(xing)。真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)爐(lu)(lu)(lu)(lu)的(de)(de)(de)(de)技(ji)術參數-型(xing)號：JR-THL40/120、JR-THL50/160等。-有效(xiao)空(kong)(kong)(kong)(kong)(kong)間：根據型(xing)號不(bu)同(tong)而(er)變(bian)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)。-電源功率：108KW至250KW。-加(jia)(jia)(jia)熱方式(shi)：石墨棒加(jia)(jia)(jia)熱。-zui高(gao)(gao)(gao)溫(wen)(wen)度：可達2200℃。-極限真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)度：可達1.2×10^-3 Pa。市場(chang)(chang)需求(qiu)(qiu)與(yu)發展趨勢根據市場(chang)(chang)研究報告，中(zhong)國真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)爐(lu)(lu)(lu)(lu)行(xing)業(ye)市場(chang)(chang)規(gui)模(mo)在(zai)2019年達到了約50億美元，年復(fu)合增(zeng)長率約為(wei)6%。隨著全球對(dui)環(huan)保和(he)綠色制(zhi)造的(de)(de)(de)(de)關(guan)注(zhu)增(zeng)加(jia)(jia)(jia)，以(yi)及新(xin)材(cai)(cai)料(liao)領域(yu)的(de)(de)(de)(de)快速發展，預計到2030年，全球市場(chang)(chang)規(gui)模(mo)有望突(tu)破75億美元。這表明真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)爐(lu)(lu)(lu)(lu)行(xing)業(ye)具有廣(guang)闊(kuo)的(de)(de)(de)(de)發展前景和(he)巨大的(de)(de)(de)(de)市場(chang)(chang)潛力。綜上所述(shu)，真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)爐(lu)(lu)(lu)(lu)作為(wei)一種(zhong)高(gao)(gao)(gao)-效(xiao)、環(huan)保的(de)(de)(de)(de)碳(tan)(tan)(tan)(tan)(tan)化(hua)(hua)(hua)(hua)(hua)(hua)(hua)處(chu)理(li)設備(bei)(bei)，其應(ying)用(yong)(yong)(yong)(yong)(yong)領域(yu)廣(guang)泛，技(ji)術先(xian)進(jin)(jin)，市場(chang)(chang)需求(qiu)(qiu)大，是未來(lai)工(gong)業(ye)發展的(de)(de)(de)(de)重(zhong)要方向之一。

　　氣(qi)(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)爐(lu)(lu)(lu)的(de)(de)(de)(de)(de)(de)(de)結(jie)構及工作(zuo)(zuo)原(yuan)理(li)(li)(li)　　氣(qi)(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)爐(lu)(lu)(lu)（Gas Phase Deposition Furnace）是(shi)一(yi)種(zhong)用(yong)于(yu)材料(liao)薄(bo)(bo)膜生(sheng)長(chang)(chang)的(de)(de)(de)(de)(de)(de)(de)實(shi)(shi)驗(yan)設(she)備，常(chang)用(yong)于(yu)半導體(ti)(ti)(ti)、光電子、納米(mi)科(ke)技(ji)等(deng)領域(yu)。下面是(shi)氣(qi)(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)爐(lu)(lu)(lu)的(de)(de)(de)(de)(de)(de)(de)基本(ben)結(jie)構和(he)(he)工作(zuo)(zuo)原(yuan)理(li)(li)(li)的(de)(de)(de)(de)(de)(de)(de)簡(jian)要(yao)說(shuo)明：　　氣(qi)(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)爐(lu)(lu)(lu)結(jie)構：　　氣(qi)(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)爐(lu)(lu)(lu)通(tong)(tong)(tong)(tong)(tong)常(chang)由以下幾(ji)個(ge)(ge)主(zhu)要(yao)組成部分構成：　　1.反(fan)應(ying)(ying)(ying)室(shi)(shi)（Reaction Chamber）：用(yong)于(yu)放(fang)(fang)置(zhi)材料(liao)襯(chen)底(di)（Substrate）以及執行反(fan)應(ying)(ying)(ying)的(de)(de)(de)(de)(de)(de)(de)區域(yu)。反(fan)應(ying)(ying)(ying)室(shi)(shi)通(tong)(tong)(tong)(tong)(tong)常(chang)是(shi)一(yi)個(ge)(ge)密封(feng)的(de)(de)(de)(de)(de)(de)(de)金屬腔(qiang)體(ti)(ti)(ti)，具(ju)有(you)高溫抗腐蝕性(xing)能。　　2.加(jia)熱(re)(re)(re)系(xi)統（Heating System）：用(yong)于(yu)提供(gong)(gong)(gong)(gong)反(fan)應(ying)(ying)(ying)室(shi)(shi)內(nei)的(de)(de)(de)(de)(de)(de)(de)高溫環境。加(jia)熱(re)(re)(re)系(xi)統通(tong)(tong)(tong)(tong)(tong)常(chang)采(cai)用(yong)電阻(zu)加(jia)熱(re)(re)(re)或(huo)感應(ying)(ying)(ying)加(jia)熱(re)(re)(re)的(de)(de)(de)(de)(de)(de)(de)方式，通(tong)(tong)(tong)(tong)(tong)過加(jia)熱(re)(re)(re)元件（比如加(jia)熱(re)(re)(re)線圈(quan)）提供(gong)(gong)(gong)(gong)熱(re)(re)(re)源。　　3.氣(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)供(gong)(gong)(gong)(gong)應(ying)(ying)(ying)系(xi)統（Gas Supply System）：用(yong)于(yu)控制和(he)(he)提供(gong)(gong)(gong)(gong)反(fan)應(ying)(ying)(ying)室(shi)(shi)內(nei)所(suo)需的(de)(de)(de)(de)(de)(de)(de)氣(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)混(hun)合物(wu)(wu)。氣(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)供(gong)(gong)(gong)(gong)應(ying)(ying)(ying)系(xi)統通(tong)(tong)(tong)(tong)(tong)常(chang)包括多個(ge)(ge)氣(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)進(jin)口、流量(liang)控制器和(he)(he)混(hun)合裝(zhuang)置(zhi)等(deng)。　　4.排氣(qi)(qi)(qi)(qi)(qi)(qi)系(xi)統（Exhaust System）：用(yong)于(yu)排除(chu)反(fan)應(ying)(ying)(ying)室(shi)(shi)內(nei)產生(sheng)的(de)(de)(de)(de)(de)(de)(de)廢氣(qi)(qi)(qi)(qi)(qi)(qi)和(he)(he)雜質(zhi)。排氣(qi)(qi)(qi)(qi)(qi)(qi)系(xi)統通(tong)(tong)(tong)(tong)(tong)常(chang)包括真(zhen)空(kong)泵(beng)和(he)(he)廢氣(qi)(qi)(qi)(qi)(qi)(qi)處理(li)(li)(li)裝(zhuang)置(zhi)等(deng)。　　5.控制系(xi)統（Control System）：用(yong)于(yu)對爐(lu)(lu)(lu)子的(de)(de)(de)(de)(de)(de)(de)溫度(du)(du)、氣(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)流量(liang)等(deng)參數進(jin)行實(shi)(shi)時(shi)監控和(he)(he)調節(jie)。　　氣(qi)(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)爐(lu)(lu)(lu)工作(zuo)(zuo)原(yuan)理(li)(li)(li)：　　氣(qi)(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)爐(lu)(lu)(lu)的(de)(de)(de)(de)(de)(de)(de)工作(zuo)(zuo)原(yuan)理(li)(li)(li)是(shi)利用(yong)熱(re)(re)(re)分解(jie)或(huo)化(hua)學(xue)反(fan)應(ying)(ying)(ying)將(jiang)(jiang)氣(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)源中(zhong)(zhong)的(de)(de)(de)(de)(de)(de)(de)原(yuan)料(liao)分子在(zai)(zai)高溫環境下轉(zhuan)化(hua)為(wei)可沉(chen)積(ji)的(de)(de)(de)(de)(de)(de)(de)材料(liao)薄(bo)(bo)膜。具(ju)體(ti)(ti)(ti)步驟(zou)如下：　　1.襯(chen)底(di)放(fang)(fang)置(zhi)：將(jiang)(jiang)待生(sheng)長(chang)(chang)的(de)(de)(de)(de)(de)(de)(de)襯(chen)底(di)放(fang)(fang)置(zhi)在(zai)(zai)反(fan)應(ying)(ying)(ying)室(shi)(shi)中(zhong)(zhong)的(de)(de)(de)(de)(de)(de)(de)加(jia)熱(re)(re)(re)區域(yu)，通(tong)(tong)(tong)(tong)(tong)常(chang)通(tong)(tong)(tong)(tong)(tong)過夾持(chi)裝(zhuang)置(zhi)固定(ding)。　　2.加(jia)熱(re)(re)(re)預處理(li)(li)(li)：加(jia)熱(re)(re)(re)系(xi)統提供(gong)(gong)(gong)(gong)熱(re)(re)(re)源，將(jiang)(jiang)反(fan)應(ying)(ying)(ying)室(shi)(shi)內(nei)的(de)(de)(de)(de)(de)(de)(de)溫度(du)(du)升至所(suo)需的(de)(de)(de)(de)(de)(de)(de)生(sheng)長(chang)(chang)溫度(du)(du)。此過程通(tong)(tong)(tong)(tong)(tong)常(chang)在(zai)(zai)惰性(xing)氣(qi)(qi)(qi)(qi)(qi)(qi)氛下進(jin)行，以排除(chu)氧氣(qi)(qi)(qi)(qi)(qi)(qi)和(he)(he)其他(ta)雜質(zhi)。　　3.氣(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)供(gong)(gong)(gong)(gong)應(ying)(ying)(ying)和(he)(he)反(fan)應(ying)(ying)(ying)：氣(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)供(gong)(gong)(gong)(gong)應(ying)(ying)(ying)系(xi)統控制并提供(gong)(gong)(gong)(gong)所(suo)需的(de)(de)(de)(de)(de)(de)(de)氣(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)混(hun)合物(wu)(wu)，其通(tong)(tong)(tong)(tong)(tong)過進(jin)入反(fan)應(ying)(ying)(ying)室(shi)(shi)與襯(chen)底(di)表面發生(sheng)化(hua)學(xue)反(fan)應(ying)(ying)(ying)或(huo)熱(re)(re)(re)分解(jie)，產生(sheng)可沉(chen)積(ji)的(de)(de)(de)(de)(de)(de)(de)物(wu)(wu)種(zhong)。　　4.材料(liao)沉(chen)積(ji)：沉(chen)積(ji)物(wu)(wu)種(zhong)在(zai)(zai)襯(chen)底(di)表面吸附并形成一(yi)層薄(bo)(bo)膜。其形貌、結(jie)構和(he)(he)性(xing)質(zhi)可通(tong)(tong)(tong)(tong)(tong)過控制溫度(du)(du)、氣(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)流量(liang)和(he)(he)沉(chen)積(ji)時(shi)間等(deng)參數來調節(jie)。　　5.冷(leng)卻和(he)(he)取出：完成材料(liao)沉(chen)積(ji)后，可關閉氣(qi)(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)供(gong)(gong)(gong)(gong)應(ying)(ying)(ying)和(he)(he)加(jia)熱(re)(re)(re)系(xi)統，讓(rang)襯(chen)底(di)緩(huan)慢(man)冷(leng)卻。待冷(leng)卻至安全溫度(du)(du)后，可以取出生(sheng)長(chang)(chang)的(de)(de)(de)(de)(de)(de)(de)薄(bo)(bo)膜。　　需要(yao)注意的(de)(de)(de)(de)(de)(de)(de)是(shi)，具(ju)體(ti)(ti)(ti)的(de)(de)(de)(de)(de)(de)(de)氣(qi)(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)爐(lu)(lu)(lu)工作(zuo)(zuo)原(yuan)理(li)(li)(li)會因不同(tong)類型的(de)(de)(de)(de)(de)(de)(de)沉(chen)積(ji)方法（如化(hua)學(xue)氣(qi)(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)、物(wu)(wu)理(li)(li)(li)氣(qi)(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)等(deng)）和(he)(he)所(suo)研究的(de)(de)(de)(de)(de)(de)(de)材料(liao)而(er)有(you)所(suo)不同(tong)。上述(shu)僅為(wei)一(yi)般(ban)的(de)(de)(de)(de)(de)(de)(de)工作(zuo)(zuo)原(yuan)理(li)(li)(li)示意，實(shi)(shi)際(ji)操作(zuo)(zuo)中(zhong)(zhong)需根據(ju)具(ju)體(ti)(ti)(ti)情況進(jin)行參數調節(jie)和(he)(he)設(she)備操作(zuo)(zuo)。