真(zhen)(zhen)(zhen)空(kong)(kong)(kong)燒(shao)(shao)結(jie)(jie)(jie)爐(lu)(lu)(lu)故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)原(yuan)(yuan)(yuan)因(yin)及(ji)(ji)(ji)處(chu)(chu)(chu)理辦(ban)(ban)法(fa)　　真(zhen)(zhen)(zhen)空(kong)(kong)(kong)燒(shao)(shao)結(jie)(jie)(jie)爐(lu)(lu)(lu)是(shi)(shi)(shi)(shi)(shi)(shi)一種(zhong)(zhong)廣泛應用于(yu)(yu)(yu)材料制(zhi)備和(he)加(jia)工(gong)的(de)高溫(wen)(wen)(wen)設(she)備。然而(er)，由(you)(you)于(yu)(yu)(yu)各(ge)種(zhong)(zhong)原(yuan)(yuan)(yuan)因(yin)，真(zhen)(zhen)(zhen)空(kong)(kong)(kong)燒(shao)(shao)結(jie)(jie)(jie)爐(lu)(lu)(lu)可(ke)(ke)(ke)能(neng)(neng)會出(chu)現(xian)各(ge)種(zhong)(zhong)故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)，影響其正(zheng)常(chang)(chang)(chang)(chang)(chang)運轉。真(zhen)(zhen)(zhen)空(kong)(kong)(kong)燒(shao)(shao)結(jie)(jie)(jie)爐(lu)(lu)(lu)廠家八佳電(dian)(dian)(dian)氣(qi)(qi)將(jiang)詳細介紹真(zhen)(zhen)(zhen)空(kong)(kong)(kong)燒(shao)(shao)結(jie)(jie)(jie)爐(lu)(lu)(lu)的(de)常(chang)(chang)(chang)(chang)(chang)見故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)原(yuan)(yuan)(yuan)因(yin)及(ji)(ji)(ji)相應的(de)處(chu)(chu)(chu)理辦(ban)(ban)法(fa)。　　一、真(zhen)(zhen)(zhen)空(kong)(kong)(kong)度(du)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)　　1.故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)原(yuan)(yuan)(yuan)因(yin)：真(zhen)(zhen)(zhen)空(kong)(kong)(kong)度(du)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)通常(chang)(chang)(chang)(chang)(chang)是(shi)(shi)(shi)(shi)(shi)(shi)由(you)(you)于(yu)(yu)(yu)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)系(xi)(xi)統(tong)(tong)密(mi)(mi)(mi)封性能(neng)(neng)下降或(huo)漏氣(qi)(qi)所(suo)(suo)導(dao)致(zhi)。這可(ke)(ke)(ke)能(neng)(neng)是(shi)(shi)(shi)(shi)(shi)(shi)由(you)(you)于(yu)(yu)(yu)密(mi)(mi)(mi)封圈(quan)(quan)老化、密(mi)(mi)(mi)封面松動(dong)或(huo)管道破裂等原(yuan)(yuan)(yuan)因(yin)引起。　　2.處(chu)(chu)(chu)理辦(ban)(ban)法(fa)：檢(jian)(jian)查(cha)(cha)(cha)(cha)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)系(xi)(xi)統(tong)(tong)的(de)密(mi)(mi)(mi)封圈(quan)(quan)是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)老化或(huo)損壞，及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)更(geng)(geng)(geng)(geng)換(huan)(huan)密(mi)(mi)(mi)封圈(quan)(quan)。檢(jian)(jian)查(cha)(cha)(cha)(cha)密(mi)(mi)(mi)封面是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)緊(jin)固，如(ru)(ru)(ru)(ru)(ru)(ru)有問(wen)(wen)(wen)題(ti)(ti)(ti)及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)調(diao)(diao)整(zheng)或(huo)更(geng)(geng)(geng)(geng)換(huan)(huan)密(mi)(mi)(mi)封面。檢(jian)(jian)查(cha)(cha)(cha)(cha)管道是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)有破裂或(huo)松動(dong)現(xian)象(xiang)，如(ru)(ru)(ru)(ru)(ru)(ru)有，立即修復(fu)或(huo)更(geng)(geng)(geng)(geng)換(huan)(huan)管道。　　二(er)、溫(wen)(wen)(wen)度(du)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)　　1.故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)原(yuan)(yuan)(yuan)因(yin)：溫(wen)(wen)(wen)度(du)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)可(ke)(ke)(ke)能(neng)(neng)是(shi)(shi)(shi)(shi)(shi)(shi)由(you)(you)于(yu)(yu)(yu)加(jia)熱(re)元件(jian)故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)、測(ce)(ce)溫(wen)(wen)(wen)傳(chuan)(chuan)(chuan)(chuan)感器(qi)(qi)故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)或(huo)控(kong)制(zhi)系(xi)(xi)統(tong)(tong)故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)所(suo)(suo)導(dao)致(zhi)。　　2.處(chu)(chu)(chu)理辦(ban)(ban)法(fa)：檢(jian)(jian)查(cha)(cha)(cha)(cha)加(jia)熱(re)元件(jian)是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)正(zheng)常(chang)(chang)(chang)(chang)(chang)工(gong)作，如(ru)(ru)(ru)(ru)(ru)(ru)有問(wen)(wen)(wen)題(ti)(ti)(ti)及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)更(geng)(geng)(geng)(geng)換(huan)(huan)。檢(jian)(jian)查(cha)(cha)(cha)(cha)測(ce)(ce)溫(wen)(wen)(wen)傳(chuan)(chuan)(chuan)(chuan)感器(qi)(qi)是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)準確測(ce)(ce)量溫(wen)(wen)(wen)度(du)，如(ru)(ru)(ru)(ru)(ru)(ru)有誤(wu)差及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)調(diao)(diao)整(zheng)或(huo)更(geng)(geng)(geng)(geng)換(huan)(huan)傳(chuan)(chuan)(chuan)(chuan)感器(qi)(qi)。檢(jian)(jian)查(cha)(cha)(cha)(cha)控(kong)制(zhi)系(xi)(xi)統(tong)(tong)是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)有故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)，如(ru)(ru)(ru)(ru)(ru)(ru)有問(wen)(wen)(wen)題(ti)(ti)(ti)及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)修復(fu)或(huo)更(geng)(geng)(geng)(geng)換(huan)(huan)控(kong)制(zhi)元件(jian)。　　三、冷(leng)(leng)(leng)卻(que)(que)(que)(que)(que)水(shui)(shui)(shui)(shui)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)　　1.故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)原(yuan)(yuan)(yuan)因(yin)：冷(leng)(leng)(leng)卻(que)(que)(que)(que)(que)水(shui)(shui)(shui)(shui)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)可(ke)(ke)(ke)能(neng)(neng)是(shi)(shi)(shi)(shi)(shi)(shi)由(you)(you)于(yu)(yu)(yu)冷(leng)(leng)(leng)卻(que)(que)(que)(que)(que)水(shui)(shui)(shui)(shui)系(xi)(xi)統(tong)(tong)堵塞、水(shui)(shui)(shui)(shui)泵故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)或(huo)冷(leng)(leng)(leng)卻(que)(que)(que)(que)(que)水(shui)(shui)(shui)(shui)溫(wen)(wen)(wen)度(du)過高所(suo)(suo)導(dao)致(zhi)。　　2.處(chu)(chu)(chu)理辦(ban)(ban)法(fa)：檢(jian)(jian)查(cha)(cha)(cha)(cha)冷(leng)(leng)(leng)卻(que)(que)(que)(que)(que)水(shui)(shui)(shui)(shui)系(xi)(xi)統(tong)(tong)是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)暢(chang)通，如(ru)(ru)(ru)(ru)(ru)(ru)有堵塞及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)清理。檢(jian)(jian)查(cha)(cha)(cha)(cha)水(shui)(shui)(shui)(shui)泵是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)正(zheng)常(chang)(chang)(chang)(chang)(chang)工(gong)作，如(ru)(ru)(ru)(ru)(ru)(ru)有問(wen)(wen)(wen)題(ti)(ti)(ti)及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)更(geng)(geng)(geng)(geng)換(huan)(huan)或(huo)維修水(shui)(shui)(shui)(shui)泵。檢(jian)(jian)查(cha)(cha)(cha)(cha)冷(leng)(leng)(leng)卻(que)(que)(que)(que)(que)水(shui)(shui)(shui)(shui)溫(wen)(wen)(wen)度(du)是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)過高，如(ru)(ru)(ru)(ru)(ru)(ru)有問(wen)(wen)(wen)題(ti)(ti)(ti)及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)調(diao)(diao)整(zheng)冷(leng)(leng)(leng)卻(que)(que)(que)(que)(que)水(shui)(shui)(shui)(shui)流量或(huo)更(geng)(geng)(geng)(geng)換(huan)(huan)冷(leng)(leng)(leng)卻(que)(que)(que)(que)(que)水(shui)(shui)(shui)(shui)。　　四、爐(lu)(lu)(lu)體(ti)振動(dong)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)　　1.故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)原(yuan)(yuan)(yuan)因(yin)：爐(lu)(lu)(lu)體(ti)振動(dong)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)可(ke)(ke)(ke)能(neng)(neng)是(shi)(shi)(shi)(shi)(shi)(shi)由(you)(you)于(yu)(yu)(yu)爐(lu)(lu)(lu)體(ti)支(zhi)撐部件(jian)松動(dong)、爐(lu)(lu)(lu)體(ti)熱(re)膨脹不(bu)均或(huo)負(fu)(fu)載(zai)過重(zhong)所(suo)(suo)導(dao)致(zhi)。　　2.處(chu)(chu)(chu)理辦(ban)(ban)法(fa)：檢(jian)(jian)查(cha)(cha)(cha)(cha)爐(lu)(lu)(lu)體(ti)支(zhi)撐部件(jian)是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)緊(jin)固，如(ru)(ru)(ru)(ru)(ru)(ru)有問(wen)(wen)(wen)題(ti)(ti)(ti)及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)緊(jin)固或(huo)更(geng)(geng)(geng)(geng)換(huan)(huan)部件(jian)。檢(jian)(jian)查(cha)(cha)(cha)(cha)爐(lu)(lu)(lu)體(ti)熱(re)膨脹是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)均勻，如(ru)(ru)(ru)(ru)(ru)(ru)有問(wen)(wen)(wen)題(ti)(ti)(ti)及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)調(diao)(diao)整(zheng)加(jia)熱(re)元件(jian)或(huo)改善爐(lu)(lu)(lu)體(ti)散熱(re)條(tiao)件(jian)。檢(jian)(jian)查(cha)(cha)(cha)(cha)負(fu)(fu)載(zai)是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)過重(zhong)，如(ru)(ru)(ru)(ru)(ru)(ru)有問(wen)(wen)(wen)題(ti)(ti)(ti)及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)減輕負(fu)(fu)載(zai)。　　五、電(dian)(dian)(dian)氣(qi)(qi)故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)　　1.故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)原(yuan)(yuan)(yuan)因(yin)：電(dian)(dian)(dian)氣(qi)(qi)故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)可(ke)(ke)(ke)能(neng)(neng)是(shi)(shi)(shi)(shi)(shi)(shi)由(you)(you)于(yu)(yu)(yu)電(dian)(dian)(dian)源(yuan)故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)、控(kong)制(zhi)系(xi)(xi)統(tong)(tong)電(dian)(dian)(dian)路故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)或(huo)傳(chuan)(chuan)(chuan)(chuan)感器(qi)(qi)信號異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)所(suo)(suo)導(dao)致(zhi)。　　2.處(chu)(chu)(chu)理辦(ban)(ban)法(fa)：檢(jian)(jian)查(cha)(cha)(cha)(cha)電(dian)(dian)(dian)源(yuan)是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)正(zheng)常(chang)(chang)(chang)(chang)(chang)，如(ru)(ru)(ru)(ru)(ru)(ru)有問(wen)(wen)(wen)題(ti)(ti)(ti)及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)修復(fu)或(huo)更(geng)(geng)(geng)(geng)換(huan)(huan)電(dian)(dian)(dian)源(yuan)。檢(jian)(jian)查(cha)(cha)(cha)(cha)控(kong)制(zhi)系(xi)(xi)統(tong)(tong)電(dian)(dian)(dian)路是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)正(zheng)常(chang)(chang)(chang)(chang)(chang)，如(ru)(ru)(ru)(ru)(ru)(ru)有問(wen)(wen)(wen)題(ti)(ti)(ti)及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)修復(fu)或(huo)更(geng)(geng)(geng)(geng)換(huan)(huan)電(dian)(dian)(dian)路板。檢(jian)(jian)查(cha)(cha)(cha)(cha)傳(chuan)(chuan)(chuan)(chuan)感器(qi)(qi)信號是(shi)(shi)(shi)(shi)(shi)(shi)否(fou)(fou)(fou)(fou)(fou)正(zheng)常(chang)(chang)(chang)(chang)(chang)，如(ru)(ru)(ru)(ru)(ru)(ru)有問(wen)(wen)(wen)題(ti)(ti)(ti)及(ji)(ji)(ji)時(shi)(shi)(shi)(shi)(shi)(shi)調(diao)(diao)整(zheng)或(huo)更(geng)(geng)(geng)(geng)換(huan)(huan)傳(chuan)(chuan)(chuan)(chuan)感器(qi)(qi)。　　綜(zong)上(shang)所(suo)(suo)述(shu)，真(zhen)(zhen)(zhen)空(kong)(kong)(kong)燒(shao)(shao)結(jie)(jie)(jie)爐(lu)(lu)(lu)的(de)常(chang)(chang)(chang)(chang)(chang)見故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)原(yuan)(yuan)(yuan)因(yin)主要包括真(zhen)(zhen)(zhen)空(kong)(kong)(kong)度(du)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)、溫(wen)(wen)(wen)度(du)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)、冷(leng)(leng)(leng)卻(que)(que)(que)(que)(que)水(shui)(shui)(shui)(shui)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)、爐(lu)(lu)(lu)體(ti)振動(dong)異(yi)(yi)(yi)(yi)常(chang)(chang)(chang)(chang)(chang)和(he)電(dian)(dian)(dian)氣(qi)(qi)故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)等。針(zhen)對不(bu)同故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)原(yuan)(yuan)(yuan)因(yin)，采取相應的(de)處(chu)(chu)(chu)理辦(ban)(ban)法(fa)進行修復(fu)和(he)排(pai)除故(gu)(gu)(gu)(gu)障(zhang)(zhang)(zhang)(zhang)，確保真(zhen)(zhen)(zhen)空(kong)(kong)(kong)燒(shao)(shao)結(jie)(jie)(jie)爐(lu)(lu)(lu)的(de)正(zheng)常(chang)(chang)(chang)(chang)(chang)運轉和(he)生產過程的(de)順利(li)進行。

　　操(cao)(cao)(cao)作(zuo)(zuo)(zuo)(zuo)氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)爐(lu)(lu)(lu)(lu)(lu)時(shi)需(xu)注意的(de)(de)(de)(de)(de)(de)(de)(de)(de)關(guan)鍵參(can)(can)(can)數(shu)(shu)以(yi)(yi)(yi)優化生(sheng)(sheng)(sheng)(sheng)產(chan)(chan)過(guo)(guo)程(cheng)(cheng)(cheng)(cheng)　　氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)爐(lu)(lu)(lu)(lu)(lu)作(zuo)(zuo)(zuo)(zuo)為現代(dai)材料(liao)(liao)制(zhi)(zhi)備(bei)(bei)的(de)(de)(de)(de)(de)(de)(de)(de)(de)重(zhong)(zhong)要(yao)(yao)設備(bei)(bei)，其操(cao)(cao)(cao)作(zuo)(zuo)(zuo)(zuo)過(guo)(guo)程(cheng)(cheng)(cheng)(cheng)中的(de)(de)(de)(de)(de)(de)(de)(de)(de)參(can)(can)(can)數(shu)(shu)控(kong)制(zhi)(zhi)直接關(guan)系(xi)到(dao)(dao)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)材料(liao)(liao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)質量與(yu)(yu)(yu)(yu)生(sheng)(sheng)(sheng)(sheng)產(chan)(chan)效(xiao)率(lv)(lv)(lv)。因(yin)(yin)此(ci)(ci)(ci)，在(zai)(zai)操(cao)(cao)(cao)作(zuo)(zuo)(zuo)(zuo)氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)爐(lu)(lu)(lu)(lu)(lu)時(shi)，精確(que)(que)(que)掌握并調整關(guan)鍵參(can)(can)(can)數(shu)(shu)，對(dui)(dui)于(yu)優化生(sheng)(sheng)(sheng)(sheng)產(chan)(chan)過(guo)(guo)程(cheng)(cheng)(cheng)(cheng)具(ju)有重(zhong)(zhong)要(yao)(yao)意義。氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)爐(lu)(lu)(lu)(lu)(lu)廠(chang)家(jia)洛(luo)陽(yang)八佳電(dian)氣(qi)(qi)(qi)(qi)(qi)將詳(xiang)細(xi)探討在(zai)(zai)操(cao)(cao)(cao)作(zuo)(zuo)(zuo)(zuo)氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)爐(lu)(lu)(lu)(lu)(lu)時(shi)需(xu)要(yao)(yao)注意的(de)(de)(de)(de)(de)(de)(de)(de)(de)關(guan)鍵參(can)(can)(can)數(shu)(shu)及其影響(xiang)(xiang)(xiang)(xiang)。　　一、溫度(du)(du)(du)(du)參(can)(can)(can)數(shu)(shu)　　溫度(du)(du)(du)(du)是氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)過(guo)(guo)程(cheng)(cheng)(cheng)(cheng)中至關(guan)重(zhong)(zhong)要(yao)(yao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)參(can)(can)(can)數(shu)(shu)之(zhi)一。它(ta)直接影響(xiang)(xiang)(xiang)(xiang)著原料(liao)(liao)氣(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)的(de)(de)(de)(de)(de)(de)(de)(de)(de)分(fen)(fen)(fen)解、化合(he)(he)以(yi)(yi)(yi)及薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)生(sheng)(sheng)(sheng)(sheng)長(chang)(chang)速(su)(su)率(lv)(lv)(lv)。過(guo)(guo)低(di)的(de)(de)(de)(de)(de)(de)(de)(de)(de)溫度(du)(du)(du)(du)可(ke)(ke)(ke)能(neng)(neng)(neng)導致原料(liao)(liao)氣(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)分(fen)(fen)(fen)解不(bu)(bu)完全，影響(xiang)(xiang)(xiang)(xiang)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)純度(du)(du)(du)(du)與(yu)(yu)(yu)(yu)結構；而(er)過(guo)(guo)高的(de)(de)(de)(de)(de)(de)(de)(de)(de)溫度(du)(du)(du)(du)則可(ke)(ke)(ke)能(neng)(neng)(neng)導致薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)晶粒粗大(da)，影響(xiang)(xiang)(xiang)(xiang)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)性(xing)(xing)能(neng)(neng)(neng)。因(yin)(yin)此(ci)(ci)(ci)，在(zai)(zai)操(cao)(cao)(cao)作(zuo)(zuo)(zuo)(zuo)氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)爐(lu)(lu)(lu)(lu)(lu)時(shi)，需(xu)要(yao)(yao)根(gen)據(ju)(ju)具(ju)體(ti)(ti)(ti)(ti)的(de)(de)(de)(de)(de)(de)(de)(de)(de)材料(liao)(liao)體(ti)(ti)(ti)(ti)系(xi)與(yu)(yu)(yu)(yu)工(gong)(gong)藝要(yao)(yao)求(qiu)，精確(que)(que)(que)控(kong)制(zhi)(zhi)爐(lu)(lu)(lu)(lu)(lu)內的(de)(de)(de)(de)(de)(de)(de)(de)(de)溫度(du)(du)(du)(du)，確(que)(que)(que)保(bao)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)均勻(yun)性(xing)(xing)與(yu)(yu)(yu)(yu)質量。　　二、壓(ya)力(li)參(can)(can)(can)數(shu)(shu)　　壓(ya)力(li)參(can)(can)(can)數(shu)(shu)同(tong)(tong)樣對(dui)(dui)氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)過(guo)(guo)程(cheng)(cheng)(cheng)(cheng)產(chan)(chan)生(sheng)(sheng)(sheng)(sheng)重(zhong)(zhong)要(yao)(yao)影響(xiang)(xiang)(xiang)(xiang)。爐(lu)(lu)(lu)(lu)(lu)內的(de)(de)(de)(de)(de)(de)(de)(de)(de)壓(ya)力(li)影響(xiang)(xiang)(xiang)(xiang)著氣(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)分(fen)(fen)(fen)子的(de)(de)(de)(de)(de)(de)(de)(de)(de)擴散速(su)(su)率(lv)(lv)(lv)與(yu)(yu)(yu)(yu)碰撞頻(pin)率(lv)(lv)(lv)，進(jin)(jin)而(er)影響(xiang)(xiang)(xiang)(xiang)到(dao)(dao)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)生(sheng)(sheng)(sheng)(sheng)長(chang)(chang)過(guo)(guo)程(cheng)(cheng)(cheng)(cheng)。在(zai)(zai)高壓(ya)條件(jian)下，氣(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)分(fen)(fen)(fen)子的(de)(de)(de)(de)(de)(de)(de)(de)(de)擴散速(su)(su)率(lv)(lv)(lv)降低(di)，可(ke)(ke)(ke)能(neng)(neng)(neng)導致薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)生(sheng)(sheng)(sheng)(sheng)長(chang)(chang)速(su)(su)率(lv)(lv)(lv)減緩；而(er)在(zai)(zai)低(di)壓(ya)條件(jian)下，氣(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)分(fen)(fen)(fen)子的(de)(de)(de)(de)(de)(de)(de)(de)(de)平均自由程(cheng)(cheng)(cheng)(cheng)增(zeng)加(jia)，有利于(yu)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)均勻(yun)生(sheng)(sheng)(sheng)(sheng)長(chang)(chang)。因(yin)(yin)此(ci)(ci)(ci)，在(zai)(zai)操(cao)(cao)(cao)作(zuo)(zuo)(zuo)(zuo)過(guo)(guo)程(cheng)(cheng)(cheng)(cheng)中，需(xu)要(yao)(yao)根(gen)據(ju)(ju)實際情況(kuang)調整爐(lu)(lu)(lu)(lu)(lu)內的(de)(de)(de)(de)(de)(de)(de)(de)(de)壓(ya)力(li)，以(yi)(yi)(yi)獲(huo)得(de)理想的(de)(de)(de)(de)(de)(de)(de)(de)(de)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)生(sheng)(sheng)(sheng)(sheng)長(chang)(chang)效(xiao)果。　　三、氣(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)流量與(yu)(yu)(yu)(yu)組分(fen)(fen)(fen)　　氣(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)流量與(yu)(yu)(yu)(yu)組分(fen)(fen)(fen)是氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)過(guo)(guo)程(cheng)(cheng)(cheng)(cheng)中的(de)(de)(de)(de)(de)(de)(de)(de)(de)另外兩個關(guan)鍵參(can)(can)(can)數(shu)(shu)。氣(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)流量的(de)(de)(de)(de)(de)(de)(de)(de)(de)大(da)小直接決定了原料(liao)(liao)氣(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)在(zai)(zai)爐(lu)(lu)(lu)(lu)(lu)內的(de)(de)(de)(de)(de)(de)(de)(de)(de)濃度(du)(du)(du)(du)分(fen)(fen)(fen)布，進(jin)(jin)而(er)影響(xiang)(xiang)(xiang)(xiang)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)生(sheng)(sheng)(sheng)(sheng)長(chang)(chang)速(su)(su)率(lv)(lv)(lv)與(yu)(yu)(yu)(yu)厚(hou)(hou)(hou)度(du)(du)(du)(du)。組分(fen)(fen)(fen)則決定了薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)化學組成(cheng)(cheng)與(yu)(yu)(yu)(yu)性(xing)(xing)能(neng)(neng)(neng)。在(zai)(zai)操(cao)(cao)(cao)作(zuo)(zuo)(zuo)(zuo)氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)爐(lu)(lu)(lu)(lu)(lu)時(shi)，需(xu)要(yao)(yao)根(gen)據(ju)(ju)所(suo)需(xu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)材料(liao)(liao)體(ti)(ti)(ti)(ti)系(xi)，精確(que)(que)(que)控(kong)制(zhi)(zhi)氣(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)流量與(yu)(yu)(yu)(yu)組分(fen)(fen)(fen)，確(que)(que)(que)保(bao)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)成(cheng)(cheng)分(fen)(fen)(fen)與(yu)(yu)(yu)(yu)性(xing)(xing)能(neng)(neng)(neng)符合(he)(he)設計(ji)要(yao)(yao)求(qiu)。　　四(si)、基(ji)(ji)底(di)參(can)(can)(can)數(shu)(shu)　　基(ji)(ji)底(di)作(zuo)(zuo)(zuo)(zuo)為薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)生(sheng)(sheng)(sheng)(sheng)長(chang)(chang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)載體(ti)(ti)(ti)(ti)，其材質、溫度(du)(du)(du)(du)、表面狀(zhuang)態(tai)(tai)等(deng)參(can)(can)(can)數(shu)(shu)也(ye)會(hui)對(dui)(dui)氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)過(guo)(guo)程(cheng)(cheng)(cheng)(cheng)產(chan)(chan)生(sheng)(sheng)(sheng)(sheng)影響(xiang)(xiang)(xiang)(xiang)。不(bu)(bu)同(tong)(tong)材質的(de)(de)(de)(de)(de)(de)(de)(de)(de)基(ji)(ji)底(di)可(ke)(ke)(ke)能(neng)(neng)(neng)對(dui)(dui)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)生(sheng)(sheng)(sheng)(sheng)長(chang)(chang)產(chan)(chan)生(sheng)(sheng)(sheng)(sheng)不(bu)(bu)同(tong)(tong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)影響(xiang)(xiang)(xiang)(xiang)，如潤濕性(xing)(xing)、附著力(li)等(deng)。基(ji)(ji)底(di)的(de)(de)(de)(de)(de)(de)(de)(de)(de)溫度(du)(du)(du)(du)也(ye)會(hui)影響(xiang)(xiang)(xiang)(xiang)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)生(sheng)(sheng)(sheng)(sheng)長(chang)(chang)速(su)(su)率(lv)(lv)(lv)與(yu)(yu)(yu)(yu)結構。此(ci)(ci)(ci)外，基(ji)(ji)底(di)的(de)(de)(de)(de)(de)(de)(de)(de)(de)表面狀(zhuang)態(tai)(tai)如清潔度(du)(du)(du)(du)、粗糙度(du)(du)(du)(du)等(deng)也(ye)會(hui)對(dui)(dui)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)質量產(chan)(chan)生(sheng)(sheng)(sheng)(sheng)重(zhong)(zhong)要(yao)(yao)影響(xiang)(xiang)(xiang)(xiang)。因(yin)(yin)此(ci)(ci)(ci)，在(zai)(zai)操(cao)(cao)(cao)作(zuo)(zuo)(zuo)(zuo)氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)爐(lu)(lu)(lu)(lu)(lu)時(shi)，需(xu)要(yao)(yao)對(dui)(dui)基(ji)(ji)底(di)進(jin)(jin)行充分(fen)(fen)(fen)的(de)(de)(de)(de)(de)(de)(de)(de)(de)預處理，確(que)(que)(que)保(bao)其表面狀(zhuang)態(tai)(tai)良好，并根(gen)據(ju)(ju)實際情況(kuang)調整基(ji)(ji)底(di)的(de)(de)(de)(de)(de)(de)(de)(de)(de)溫度(du)(du)(du)(du)，以(yi)(yi)(yi)獲(huo)得(de)好的(de)(de)(de)(de)(de)(de)(de)(de)(de)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)生(sheng)(sheng)(sheng)(sheng)長(chang)(chang)效(xiao)果。　　五、沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)時(shi)間(jian)(jian)　　沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)時(shi)間(jian)(jian)是控(kong)制(zhi)(zhi)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)厚(hou)(hou)(hou)度(du)(du)(du)(du)的(de)(de)(de)(de)(de)(de)(de)(de)(de)關(guan)鍵參(can)(can)(can)數(shu)(shu)。過(guo)(guo)短的(de)(de)(de)(de)(de)(de)(de)(de)(de)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)時(shi)間(jian)(jian)可(ke)(ke)(ke)能(neng)(neng)(neng)導致薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)厚(hou)(hou)(hou)度(du)(du)(du)(du)不(bu)(bu)足，影響(xiang)(xiang)(xiang)(xiang)性(xing)(xing)能(neng)(neng)(neng)；而(er)過(guo)(guo)長(chang)(chang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)時(shi)間(jian)(jian)則可(ke)(ke)(ke)能(neng)(neng)(neng)導致薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)過(guo)(guo)厚(hou)(hou)(hou)，增(zeng)加(jia)生(sheng)(sheng)(sheng)(sheng)產(chan)(chan)成(cheng)(cheng)本。因(yin)(yin)此(ci)(ci)(ci)，在(zai)(zai)操(cao)(cao)(cao)作(zuo)(zuo)(zuo)(zuo)氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)爐(lu)(lu)(lu)(lu)(lu)時(shi)，需(xu)要(yao)(yao)根(gen)據(ju)(ju)所(suo)需(xu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)厚(hou)(hou)(hou)度(du)(du)(du)(du)與(yu)(yu)(yu)(yu)生(sheng)(sheng)(sheng)(sheng)長(chang)(chang)速(su)(su)率(lv)(lv)(lv)，精確(que)(que)(que)控(kong)制(zhi)(zhi)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)時(shi)間(jian)(jian)，確(que)(que)(que)保(bao)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)厚(hou)(hou)(hou)度(du)(du)(du)(du)符合(he)(he)設計(ji)要(yao)(yao)求(qiu)。　　綜上(shang)所(suo)述，操(cao)(cao)(cao)作(zuo)(zuo)(zuo)(zuo)氣(qi)(qi)(qi)(qi)(qi)相(xiang)沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)爐(lu)(lu)(lu)(lu)(lu)時(shi)需(xu)要(yao)(yao)注意的(de)(de)(de)(de)(de)(de)(de)(de)(de)關(guan)鍵參(can)(can)(can)數(shu)(shu)包括(kuo)溫度(du)(du)(du)(du)、壓(ya)力(li)、氣(qi)(qi)(qi)(qi)(qi)體(ti)(ti)(ti)(ti)流量與(yu)(yu)(yu)(yu)組分(fen)(fen)(fen)、基(ji)(ji)底(di)參(can)(can)(can)數(shu)(shu)以(yi)(yi)(yi)及沉(chen)(chen)(chen)積(ji)(ji)(ji)(ji)(ji)(ji)時(shi)間(jian)(jian)等(deng)。這些(xie)參(can)(can)(can)數(shu)(shu)之(zhi)間(jian)(jian)相(xiang)互關(guan)聯、相(xiang)互影響(xiang)(xiang)(xiang)(xiang)，需(xu)要(yao)(yao)綜合(he)(he)考(kao)慮以(yi)(yi)(yi)優化生(sheng)(sheng)(sheng)(sheng)產(chan)(chan)過(guo)(guo)程(cheng)(cheng)(cheng)(cheng)。通(tong)過(guo)(guo)精確(que)(que)(que)控(kong)制(zhi)(zhi)這些(xie)參(can)(can)(can)數(shu)(shu)，可(ke)(ke)(ke)以(yi)(yi)(yi)制(zhi)(zhi)備(bei)(bei)出高質量、高性(xing)(xing)能(neng)(neng)(neng)的(de)(de)(de)(de)(de)(de)(de)(de)(de)薄(bo)(bo)(bo)(bo)(bo)(bo)膜(mo)材料(liao)(liao)，滿足科(ke)研和工(gong)(gong)業(ye)生(sheng)(sheng)(sheng)(sheng)產(chan)(chan)的(de)(de)(de)(de)(de)(de)(de)(de)(de)需(xu)求(qiu)。